Task: Calculate the sensor deformation and electrical capacitance in initial and deformed states.
Solution: Initially the electrostatic problem is simulated to calculate the native capacitance of the sensor.
Then deformed sensor profile is calculated in stress analysis problem. The profile is exported into the separate geometry model file using Stress Deform tool. That deformed shape model is then used to run another electrostatic analysis to calculate the deformed state capacitance.
Results: Initial capacitance value 0.0026 pF
Capacitance in deformed state 0.0028 pF (+10%)
Electric field distribution in the deformed stress sensor
Calculation of deformed shape using QuickField Stress Analysis module.