MEMS stress sensor simulation, MEMS capacitance, microelectromechanical systems
MEMS sensor changes its shape under mechanical stress. The electrode plates come close and the variation in electrical capacitance is detected.
Calculate the sensor deformation and electrical capacitance in initial and deformed states.
Initially the electrostatic problem is simulated to calculate the native capacitance of the sensor.
Then deformed sensor profile is calculated in stress analysis problem. The profile is exported into the separate geometry model file using Stress Deform tool. That deformed shape model is then used to run another electrostatic analysis to calculate the deformed state capacitance.
Initial capacitance value 0.0026 pF
Capacitance in deformed state 0.0028 pF (+10%)
Electric field distribution in the deformed stress sensor