microelectromechanical device simulation, comb drive electrostatic force, MEMS device simulation, multiphysics analysis
Comb thickness Lz = 40 um.
Gap between fingers d = 2.5 um.
Relative permittivity of air ε = 1,
Relative permittivity of dielectric ε = 10,
Potential difference ΔU = 40 V
Find the attraction force and calculate displacement.
Geometry model features symmetry and only half of the comb was simulated.
The attraction force is F = 2.4 uN.
Comb x-displacement is 7 nm.
Color map of electric field stress distribution and deformed shape of the comb (scaled 500 times).