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Comb drive resonator

microelectromechanical device simulation, comb drive electrostatic force, MEMS device simulation, multiphysics analysis

Problem Type:
Axisymmetric multiphysics problem of Electrostatics coupled to Stress analysis.

Geometry:

Comb thickness Lz = 40 um.
Gap between fingers d = 2.5 um.

Given:
Relative permittivity of air ε = 1,
Relative permittivity of dielectric ε = 10,
Potential difference ΔU = 40 V

Task:
Find the attraction force and calculate displacement.

Solution:
Geometry model features symmetry and only half of the comb was simulated.

Results:
The attraction force is F = 2.4 uN.
Comb x-displacement is 7 nm.

Color map of electric field stress distribution and deformed shape of the comb (scaled 500 times).
comb drive electric field stress

  • Video: Comb drive resonator
  • Download simulation files (files may be viewed using any QuickField Edition).
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