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Main >> Applications >> Sample problems >> Comb drive resonator

Comb drive resonator

microelectromechanical device simulation, comb drive electrostatic force, MEMS device simulation, multiphysics analysis

Problem Type
Axisymmetric multiphysics problem of Electrostatics coupled to Stress analysis.

Geometry

Comb thickness Lz = 40 um.
Gap between fingers d = 2.5 um.

Given
Relative permittivity of air ε = 1,
Relative permittivity of dielectric ε = 10,
Potential difference ΔU = 40 V

Task
Find the attraction force and calculate displacement.

Solution
Geometry model features symmetry and only half of the comb was simulated.

Results
The attraction force is F = 2.4 uN.
Comb x-displacement is 7 nm.

Color map of electric field stress distribution and deformed shape of the comb (scaled 500 times).
comb drive electric field stress

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