MEMS thermal actuator - QuickField simulation example
The MEMS thermal actuator is made of polysilicon.
How to calculate displacement of a MEMS thermal actuator from Joule heating?
Answer Typical applications Geometry
Given
Task
Solution
Results
Electric potential distribution Electric current distribution Joule heat losses distribution Temperature distribution The actuator mechanical displacement is 17 um * Reference: Marin Hristov Hristov, Tihomir Borisov Takov, Ivelina Nikolaeva Cholakova,
Krassimir Hristov Denishev, Vladimir Emilov Grozdanov, Dobromir Georgiev Gaydazhiev, Design and investigation of a thermal actuator, ELECTRONICS 2008, 24-26 September, Sozopol, BULGARIA
Engineering question
Calculate current and Joule losses with DC conduction, transfer the losses to heat transfer for the temperature field, then transfer thermal expansion to stress analysis for the actuator displacement.
MEMS thermal actuators, electrothermal microactuators, polysilicon actuator structures
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Simulation problem
Problem Type
Plane-parallel problem of DC conduction, heat transfer and stress analyses.
Foil thickness is 1 micron.
Voltage applied: V+ = 5 V
Electrical resistivity: 2.3*10-5 Ohm*m
Thermal conductivity: 150 W/(m*K)
Thermal expansion coefficient: 2.9*10-6 1/K
Young's modulus: 169 GPa, Poisson's ratio: 0.22.
Calculate the electric current and Joule heat losses distribution, temperature and linear mechanical displacement.
To calculate the electric current and Joule losses distribution the DC conduction problem is simulated. Then the results are used in the thermal analysis study to calculate the temperature distribution. Finally, the stress analysis problem is simulated to calculate the related thermal deformation.
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