MEMS (microelectromechanical systems) simulation using QuickField
microelectromechanical systems
MEMS (microelectromechanical systems) often require multiphysical analysis, including electromagnetic, stress and in some cases thermal analysis. During this webinar we will demonstrate how to apply QuickField for the simulation of the microelectromechanical systems.
Introduction
1.1 MEMS thermal actuator
1.2. MEMS thermal actuator
1.3. MEMS thermal actuator
1.4. MEMS thermal actuator
2.1. Mems stress sensor
2.2. Mems stress sensor
2.3. Mems stress sensor
2.4. Mems stress sensor
3. Comb drive
MEMS thermal actuator
Comb drive
Comb drive resonator
MEMS stress sensor
