MEMS (microelectromechanical systems) simulation using QuickField
MEMS (microelectromechanical systems) often require multiphysical analysis, including electromagnetic, stress and in some cases thermal analysis. During this webinar we will demonstrate how to apply QuickField for the simulation of the microelectromechanical systems.
- Watch recorded webinar parts:
Introduction1.1 MEMS thermal actuator1.2. MEMS thermal actuator1.3. MEMS thermal actuator1.4. MEMS thermal actuator2.1. Mems stress sensor2.2. Mems stress sensor2.3. Mems stress sensor2.4. Mems stress sensor3. Comb drive
- Watch on YouTube.
- Read presentation (in PDF format).
- Simulation examples:
MEMS thermal actuator
Comb drive
Comb drive resonator
MEMS stress sensor